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PDF] THE EFFECT OF SHALLOW TRENCH ISOLATION (STI) TOPOLOGY, SIDEWALL DOPING AND LAYOUT-RELATED STRESS ON RADIATION-INDUCED LEAKAGE CURRENT By | Semantic Scholar
File:Shallow trench isolation process.svg - Wikipedia
Device isolation Techniques | PPT
͑ Color online ͒ Sketch of the structures investigated in this work. ͑... | Download Scientific Diagram
a) Initial structure before CMP: typical trench isolation structure... | Download Scientific Diagram
IC Technology: Shallow Trench Isolation technique - YouTube