KR20070051355A - Contacting and filling deep-trench-isolation with tungsten - Google Patents
Pixel device on deep trench isolation (DTI) structure for image sensor Patent Grant Takahashi , et al. September 29, 2 [Taiwan Semiconductor Manufacturing Co., Ltd.]
Modeling and characterization of deep trench isolation structures - ScienceDirect
PDF] Fabrication of keyhole-free ultra-deep high-aspect-ratio isolation trench and its applications | Semantic Scholar
Improved Design of
Albert Theuwissen's keynote at 2020 IEEE Sensors: "Deep-Trench Isolation is Here to Stay!" - YouTube
Sensors | Free Full-Text | Deep Trench Isolation and Inverted Pyramid Array Structures Used to Enhance Optical Efficiency of Photodiode in CMOS Image Sensor via Simulations
A Shallow and Deep Trench Isolation Process Module for RF BiCMOS
Highly scalable flash memory with novel deep trench isolation embedded into highperformance cmos for the 90nm node & beyond | Semantic Scholar
26: Fabrication of the deep trench isolation and implantations, which... | Download Scientific Diagram
Deep trench inter-well isolation structure - Eureka | Patsnap
MOS Capacitor Deep Trench Isolation for CMOS image sensors | Semantic Scholar
3.7.1 Trench Isolation
A Shallow and Deep Trench Isolation Process Module for RF BiCMOS
Do some search and discuss the deep trench isolation (DTI) process. T.pdf
Box Isolation Technique
Shallow trench isolation - Wikipedia
Part 3: Back-Illuminated Active Si Thickness, Deep Trench Isolation (DTI) | TechInsights
What is trench isolation? Explain its use in VLSI technology.
Figure 4 from A deep trench isolation integrated in a 0.13um BiCD process technology for analog power ICs | Semantic Scholar
Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices - ScienceDirect
A Shallow and Deep Trench Isolation Process Module for RF BiCMOS
Parasitic Suppression in 2D Smart Power ICs Using Deep Trench Isolation: A Simulation Study | SpringerLink